- Available to concurrently connect with MFC and CDG
Channel : max. 8ch. Including MFC and CDG.
- MFC Controller : KMC300/CDG Controller : KPC400
Display Resolution : 4 Digit – 7 Segment, Adjustable Decimal Location
- Display Repeatability : ± 0.1% of Full Scale
- Analog output signal : 0 to 5 Volts for MFC
0 to 10Volts available for CDG by user requirement.
- Output Power : ± 15 VDC (0.5 Amp)
- Units of Display : SCCM, SLM, % for MFC
Torr & Pa for CDG
- Standard function : Remote control, RS485 for each channel.
Relay 1-setpoint for each channel.
- Optional : Pressure control, which is available to automatically control connected MFC by CDG’s setting pressure
- Input power : 85Vac ~ 265Vac (50/60Hz)
- Mounting rack type : 1/4 rack, Half rack, Full rack(19”)
1/4” Rack : 1channel only (Optional : Half Rack or Full Rack)
Half Rack : 2channel ~ 4channel(Optional : Full Rack)
Full Rack : 5channel ~ 8channel |
