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Vacuum Pump
Oil Rotary pump WSVP Series | WSSR Series | D Series | TRP Series
Dry pump WDP Series | HJD Series | ISP Series | DVSL-500B
Water ring pump SIHI Series
Booster pump WMB Series
Special pump Refrigeration | Chemical
High vacuum pump Diffusion pump | Turbo pump
 
 
F100/110, F100/110T, F100/110N Turbomolecular Pumps
 
Type F100/110 F100/110T FX100/110D
UHV Flange DN100LF DN100CF DN100LF DN100CF DN100LF DN100CF
Order No.            
Pumping Speed (L/s) 110 110 110
Compression Ratio  N2: >108 >108 >108
  H2: 5x102 5x102 5x102
Ultimate Vacuum(Pa)   6x10-8*   6x10-8*   6x10-8*
6x10-6   6x10-6   6x10-6  
  6x10-7   6x10-7   6x10-7
Output Flange KF25 KF25 KF25
Bearing Metal Ball Bearings Ceramic Ball Bearing  
Start-up Time(min) <2 <2 <2
Rotational Speed(rpm) 42300 42300 42300
Cooling Rquirements Water&Air Water&Air Water&Air
Operating Position Vertical Or Horizonal Vertical Or Horizonal Vertical Or Horizonal
Weight(Kg) 8 8 8
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.
 
F160/450, F160/450T, F160/450N Turbomolecular Pumps
 
Type F160/450 F160/450T F160/450N
UHV Flange DN160LF DN150CF DN160LF DN150CF DN160LF DN150CF
Order No.            
Pumping Speed (L/s) 450 450 450
Compression Ratio  N2: >108 >108 >108
  H2: 103 103 103
Ultimate Vacuum(Pa)   6x10-8*   6x10-8*   6x10-8*
6x10-6   6x10-6   6x10-6  
  6x10-7   6x10-7   6x10-7
Output Flange KF40 KF40 KF40
Bearing Metal Ball Bearings Ceramic Ball Bearing Ceramic Ball Bearing
Start-up Time(min) <5 <5 <5
Rotational Speed(rpm) 24000 24000 24000
Cooling Rquirements Water Water Water
Operating Position Vertical ¡¾5¡Æ Vertical ¡¾5¡Æ Vertical ¡¾5¡Æ
Weight(Kg) 30 30 30
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.
 
FF160/620, FF160/620Z, FF160/620N Compound Molecular Pumps
 
Type F160/620 F160/620Z F160/620N
UHV Flange DN160LF DN150CF DN160LF DN150CF DN160LF DN150CF
Order No.            
Pumping Speed (L/s) 600 600 600
Compression Ratio  N2: >109 >109 >109
  H2: 6x103 6x103 6x103
>Ultimate Vacuum(Pa)   6x10-8*   6x10-8*   6x10-8*
6x10-6   6x10-6   6x10-6  
  6x10-7   6x10-7   6x10-7
Output Flange KF40 KF40 KF40
Bearing Metal Ball Bearings Grease Lubricate Ceramic Ball Bearing Ceramic Ball Bearing
Start-up Time(min) <5 <5 <5
Rotational Speed(rpm) 24000 24000 24000
Cooling Rquirements Water Water Water
Operating Position Vertical ¡¾5¡Æ Any Direction Vertical ¡¾5¡Æ
Weight(Kg) 32 32 32
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.
 
FF160/800, FF160/800T, FF160/800N Compound Molecular Pumps
 
Type FF160/800 FF160/800Z FF160/800N
UHV Flange DN160LF DN150CF DN160LF DN150CF DN160LF DN150CF
Order No.            
Pumping Speed (L/s) 800 800 800
Compression Ratio  N2: >109 >109 >109
  H2: 6x103 6x103 6x103
Ultimate Vacuum(Pa)>   6x10-8*   6x10-8*   6x10-8*
6x10-6   6x10-6   6x10-6  
  6x10-7   6x10-7   6x10-7
Output Flange KF40 KF40 KF40
Bearing Metal Ball Bearings Grease Lubricate Ceramic Ball Bearing Ceramic Ball Bearing
Start-up Time(min) <5 <5 <5
Rotational Speed(rpm) 27000 27000 27000
Cooling Rquirements Water Water Water
Operating Position Vertical ¡¾5¡Æ Any Direction Vertical ¡¾5¡Æ
Weight(Kg) 35 35 35
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.
 
FF200/1200, FF200/1200T, FF200/1200N Compound Molecular Pumps
 
Type FF200/1200 FF200/1200Z FF200/1200N
UHV Flange DN200LF DN200CF DN200LF DN200CF DN200LF DN200CF
Order No.            
Pumping Speed (L/s) 1200 1200 1200
Compression Ratio  N2: >109 >109 >109
  H2: 6x103 6x103 6x103
Ultimate Vacuum(Pa)   6x10-8*   6x10-8*   6x10-8*
6x10-6   6x10-6   6x10-6  
  6x10-7   6x10-7   6x10-7
Output Flange KF40 KF40 KF40
Bearing Metal Ball Bearings Grease Lubricate Ceramic Ball Bearing Ceramic Ball Bearing
Start-up Time(min) <5 <5 <5
Rotational Speed(rpm) 24000 24000 24000
Cooling Rquirements Water Water Water
Operating Position Vertical ¡¾5¡Æ Any Direction Vertical ¡¾5¡Æ
Weight(Kg) 45 45 45
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.
 
F250/1500, F250/1500T, F250/1500N Turbomolecular Pumps
 
Type F250/1500 F250/1500T F250/1500N
UHV Flange DN250LF DN250CF DN250LF DN250CF DN250LF DN250CF
Order No.            
Pumping Speed (L/s) 1500 1500 1500
Compression Ratio  N2: >108 >108 >108
  H2: 5x102 5x102 5x102
Ultimate Vacuum(Pa)   6x10-8*   6x10-8*   6x10-8*
6x10-6   6x10-6   6x10-6  
  6x10-7   6x10-7   6x10-7
Output Flange KF50 KF50 KF50
Bearing Metal Ball Bearings Ceramic Ball Bearing Ceramic Ball Bearing
Start-up Time(min) <8 <8 <8
Rotational Speed(rpm) 21000 21000 21000
Cooling Rquirements Water Water Water
Operating Position Vertical ¡¾5¡Æ Vertical ¡¾5¡Æ Vertical ¡¾5¡Æ
Weight(Kg) 60 60 60
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.
 
F400/3500T, F400/3500N Turbomolecular Pumps
 
Type F400/3500 F400/3500T
UHV Flange DN400LF DN400LF
Order No.    
Pumping Speed (L/s) 3500 3500
Compression Ratio  N2: >108 >108
  H2: 5x102 5x102
Ultimate Vacuum(Pa) 6x10-6 6x10-7* 6x10-6 6x10-7*
Output Flange LF100 LF100
Bearing Ceramic Ball Bearing Ceramic Ball Bearing
Start-up Time(min) <35 <35
Rotational Speed(rpm) 13500 13500
Cooling Rquirements Water Water
Operating Position Vertical ¡¾5¡Æ Vertical ¡¾5¡Æ
Weight(Kg) 90 90
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.
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