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Controller |
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- Sensor Type : SHIM Gauge
- Measurement Range : 1000Torr ~ 1mTorr
- Standards Analog Output & 2-SetPoints
Relay Output
- Optional : RS232, RS422/485
- Unit : Torr to mTorr Automatically |
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SHIM Gauge |
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- Gas Calibration : Air or N2
- Bake Out Temp : 100กษ in Air or Vacuum
- Cable : 9pin D-sub Connector,
- Multi Conductor
Shield Cable
- Cable Length : 3m(Standard), 50m(Maximum)
- Fitting : 1/8 NPT, NW16, NW25, 15m O.D,
- 1.33"CF,
1/4"VCR
กุ Gauge Axis must be
horizontal to provide
-- accurate measurement
above 1Torr |
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